CNU is leading the development of EUV photoresist based on its own original technology, which is one of Japan's three largest export control products.
CNU was selected for a national R&D project by proposing to the government the development of EUV inorganic photoresist, one of the core materials of the 4th industrial revolution. The Inorganic Nanoparticle-Based Hybrid EUV Photoresist Development Project adopted by the Ministry of Trade, Industry and Energy (Korea Institute of Technology Evaluation and Management) as a core material parts technology development project which is expected to proceed with a total of 5.5 billion KRW in research expenses until 2023.

The EUV inorganic photoresist being developed is a domestic core material managed by the Ministry of Trade, Industry and Energy among the materials, parts, and equipment industries, and is the first in Korea to develop an inorganic material technology rather than an existing organic material. It is expected to overcome the problems of organic photoresists such as width non-uniformity and low etching resistance.

For this national research, CNU, the holder of source technology, the Pohang Accelerator Research Institute (President: Ko In-soo), and the Korea Research Institute of Chemical Technology (President: Lee Mi-hye) will jointly participate in the project. In addition, the participating companies formed a consortium of institutes and enterprises through Pochem Laboratories (CEO: Kim Cheol-min). The consortium has six organizations and companies including DCT Materials (CEO: Lee Keun-soo) and JSI Silicon (CEO: Jung Hyun-tae).
 
In particular, CNU will conduct research for utilizing metal oxide cluster thin film technology and electron-driven chemistry based on the technology of inorganic nanoparticle thin-film materials previously secured by the Nanomaterials and Interface Laboratory (Professor Jeong Hyun-dam, Department of Chemistry). Through this research, CNU will lead and support the development of EUV inorganic photoresist.
 
 If the research findings are promising, it is expected that the dependence on Japan for core semiconductor materials can be overcome, and that the long-term condition of the domestic semiconductor industry can be improved.